Microlithography Fundamentals in Semiconductor Devices and Fabrication Technology (Plastics Engineering) |
 | Author: Saburo Nonogaki
Publisher: CRC Press
Category: Book
List Price: $194.95
Buy New: $35.97
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Seller: sweethomeliquid2
Sales Rank: 2,597,581
Media: Hardcover
Pages: 336
Number Of Items: 1
Shipping Weight (lbs): 1.4
Dimensions (in): 9.1 x 6.2 x 0.9
ISBN: 0824799518
Dewey Decimal Number: 621.38152
EAN: 9780824799519
ASIN: 0824799518
Publication Date: June 1, 1998
Availability: Usually ships in 1-2 business days
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Product Description
Explains the theoretical basis of semiconductor fabrication, presents the principles of optical image transfer & discusses the chemical amplification of resist materials to improve sensitivity. Describes resolution enhancement & the limits of resolution in resist materials, & covers practical aspects typical lithographic processes & more. Semiconductors - Design & construction.
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